DLC diamond-like coating is a metastable amorphous thin film, which has the high-quality characteristics of diamond and graphite, and has the advantages of good hardness, thermal conductivity, low friction coefficient, excellent electrical insulation performance, high chemical stability, etc., and is widely used in machinery manufacturing, biomedicine, electronic equipment and other fields. DLC coating is mainly prepared by physical vapor phase accumulation method and chemical vapor phase accumulation method, and is manufactured by special accumulation equipment. The following is a brief introduction to the five parts that make up the coating deposition equipment.
1. Heating and water cooling system
2. Vacuum system
3. Gas supply system
The gas supply system is placed on the top of the accumulation chamber, and the gas varieties include H2, N2, Ar, CHa, C2H2, and Si-containing gas, and two interfaces are reserved at the top of the accumulation chamber to facilitate the addition of other varieties of gases in the future.
In order to obtain the transition layer containing Si, SiH4 is usually used as the material gas, but SiH4 is more dangerous, so we choose the less dangerous Si-containing gas as the Si source in the coating processing.
4. The stacking target system
The equipment has two stacking units, PVD and PCVD, the primary intention of the PCVD unit is for the accumulation of diamond-like (DLC), the power supply selected is the pulse modulation power supply, the parameters can be adjusted one after another, after the adjustment of the parameters, the DLC coating of different hardness and thickness can be accumulated, and at the same time, after the adjustment of the workpiece card loading mode, it can also be coated on the complex workpiece; The primary intentions of the PVD unit are: (1) for different substrates, different targets can be replaced with different targets, and different adhesive layers or metal-doped DLC coatings containing different varieties of elements can be developed; (2) After replacing the target, a variety of composite coatings of "functional layer + DLC" for different categories can be formed.